UHV: Ultra High Vacuum

Electron beam patterning
A pattern would be designed and drawn with the support of Elphy Quantum
software (Design CAD by GDSII d – Calma Stream). Exposure pattern
was done by LEO 1430 SEM.
Figure 4.5: Pattern design for CNTs
Initially, samples were loaded to LEO-chamber with the acceleration
voltage of 30 kV, beam current 40 A. The wanted position for exposing,
dose, current, spot-size e, etc will be adjusted on the monitor before exposure
samples. When the exposure process takes place, the electron beam
breaks the polymer into fragments and modifies the resist, the resist sensitivity
is 200 C/cm2.
The pattern was exposed twice: rough exposure is used for large details.
working are is 265 m , current is 50 pA; fine exposure is used for
the tiny details with 64 m of working area, current is 20 pA.
dGDSII is a computer program to store and record data in byte unit [12]
eA spot-size is the electron beam diameter. The smaller the
spot-size the more tiny structures of the sample will be created
http://131.229.114.77/microscopy/semvar.html
41
CHAPTER 4. EXPERIMENTAL APPROACHES
Figure 4.6: The area of each
square is around 8×8 m
Figure 4.7: Ma

 

Our Guarantees!
• On-time delivery guarantee
• PhD-level professional writers
• Automatic plagiarism check
• 100% Privacy and Confidentiality
• High Quality custom-written papers
find the cost of your paper

evaluate and justify industrial applications of pneumatics and hydraulics-As industrial companies develop they are always looking to improve productivity, whether it being the manufacturing sector or food production.

Scenario   Most industries now apply the use of Fluid Power equipment to help increase productivity and achieve better results, but to be able to determine what equipment/systems is needed….

Hybrid nano-materials for regrow teeth tissue

Hybrid nano-materials for regrow teeth tissue Subject: Engineering Comment: http://file.scirp.org/Html/36073.html https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3289134/ http://www.digitaltrends.com/cool-tech/stem-cell-regrow-teeth/ http://phys.org/news/2015-10-regrow-tooth-fishyes-humansmaybe-day.html http://linkinghub.elsevier.com/retrieve/pii/S1882761612000610?via=sd&cc=y http://www.livescience.com/33130-why-are-teeth-not-considered-bones.html

Development and Metal evaporation

Development and Metal evaporation After the electron beam broke the polymer into fragments, the exposed resist would be dissolved by a developer solution such as MIBK (Methyl Isobutyl Ketone). MIBK….